GCA Stepper Sales, Parts, and Service

Office (512) 971-1531 - Fax (512) 312-5977 - Email:

We have a large assortment of parts in stock. Click the Parts Tab to browse our extensive parts list. For items not listed, please call or email us. We will be happy to find the right part for you.

Our extensive knowledge of all models of GCA steppers enables us to provide support to a wide variety of customers worldwide. Please call us or click the Service Tab to email us with your needs.

Click the Equipment Tab to see some of the GCA Steppers we currently have available. If you don’t see what you’re looking for, please call us. We may have items not pictured.



Stepper Care Services, Inc. (SCS)

We provide parts and service for GCA steppers, and have been committed to a superior level of customer satisfaction since 2002. With over 27 years of experience, our service team provides expedient solutions to current GCA stepper owners. Our extensive knowledge of all models of GCA steppers enables us to provide support and refurbishing to a wide variety of valued customers throughout the world.

SCS is an active part of the technical community of greater Austin, Texas. Our corporate facility houses a lithography cleanroom featuring a variety of functional GCA steppers. We currently offer a number of options, including models 8500, ALS, AutoStep200 and XLS steppers.

In October 2004, Stepper Care Services, Inc. completed the acquisition of Semiconductor Systems, Inc. (SSI) from FSI International. The SSI wafertrack product line includes: System 1A, System 150/500, SCORPIO, and OrbiTrak wafer coat and develop systems. SCS stands committed to provide quality parts, refurbishing, and technical support for current owners of these SSI wafertrack systems.

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